采(cai)用(yong)一(yi)體(ti)疊(die)層(ceng)型(xing)壓(ya)電(dian)陶(tao)瓷(ci)結(jie)構(gou),高(gao)溫(wen)燒(shao)結(jie)而(er)成(cheng),結(jie)構(gou)簡(jian)單(shan),工(gong)作(zuo)可(ke)靠(kao),疊(die)層(ceng)型(xing)壓(ya)電(dian)陶(tao)瓷(ci)高(gao)速(su)偏(pian)擺(bai)鏡(jing)結(jie)構(gou)由(you)電(dian)極(ji)層(ceng)及(ji)壓(ya)電(dian)介(jie)質(zhi)層(ceng)經(jing)多(duo)次(ci)疊(die)加(jia)共(gong)同(tong)燒(shao)結(jie)成(cheng)一(yi)體(ti),外(wai)形(xing)結(jie)構(gou)環(huan)形(xing),電(dian)極(ji)壓(ya)部(bu)分(fen)位(wei)置(zhi)相(xiang)差(chai) 90 度(duo),共(gong)四(si)組(zu)電(dian)極(ji)結(jie)構(gou),每(mei)組(zu)電(dian)極(ji)結(jie)構(gou)添(tian)加(jia)電(dian)場(chang)可(ke)獨(du)立(li)產(chan)生(sheng)位(wei)移(yi),每(mei)組(zu)電(dian)極(ji)構(gou)成(cheng)一(yi)組(zu)壓(ya)電(dian)陶(tao)瓷(ci),共(gong)組(zu)成(cheng)四(si)組(zu)疊(die)堆(dui)壓(ya)電(dian)陶(tao)瓷(ci),當(dang)四(si)組(zu)壓(ya)電(dian)陶(tao)瓷(ci)同(tong)時(shi)產(chan)生(sheng)位(wei)移(yi)時(shi),台(tai)麵(mian)產(chan)生(sheng) Z 向(xiang)位(wei)移(yi),當(dang)相(xiang)對(dui)兩(liang)支(zhi)壓(ya)電(dian)陶(tao)瓷(ci)一(yi)支(zhi)升(sheng)高(gao)一(yi)支(zhi)降(xiang)低(di)輸(shu)出(chu)台(tai)麵(mian)產(chan)生(sheng) X 軸(zhou)偏(pian)擺(bai),另(ling)兩(liang)支(zhi)壓(ya)電(dian)陶(tao)瓷(ci)也(ye)同(tong)方(fang)式(shi)驅(qu)動(dong),壓(ya)電(dian)陶(tao)瓷(ci)台(tai)麵(mian)也(ye)會(kuai)產(chan)生(sheng) Y 軸(zhou)偏(pian)擺(bai),由(you)於(yu)無(wu)機(ji)械(xie)結(jie)構(gou),壓(ya)電(dian)陶(tao)瓷(ci)高(gao)速(su)響(xiang)應(ying)頻(pin)率(shuai)高(gao),擺(bai)速(su)快(kuai),可(ke)工(gong)作(zuo)在(zai)微(wei)秒(miao)級(ji)別(bie)擺(bai)角(jue)速(su)度(duo)。
產(chan)品(pin)特(te)點(dian)
響(xiang)應(ying)頻(pin)率(shuai)更(geng)高(gao)
體(ti)積(ji)小(xiao)巧(qiao)
可(ke)閉(bi)環(huan)控(kong)製(zhi)
提(ti)供(gong)定(ding)製(zhi)服(fu)務(wu)
技(ji)術(zhu)參(shen)數(shuo)
型(xing)號(hao) | YG021003 | YG022612 |
輸(shu)出(chu)軸(zhou)方(fang)向(xiang) | Rx.Ry.z | Rx.Ry.z |
驅(qu)動(dong)電(dian)壓(ya)範(fan)圍(wei) | -20~+150V | -20~+150V |
Rx.Ry 軸(zhou)擺(bai)角(jue)範(fan)圍(wei) | ±0.1mrad±10% | ±0.5mrad±10% |
Z 向(xiang)輸(shu)出(chu)位(wei)移(yi) | 2.8μm±10% | 10μm±10% |
外(wai)形(xing)尺(che)寸(cun) | Ф10xФ3x3mm±10% | Ф26xФ12x12mm±10% |
靜(jing)態(tai)電(dian)容(rong)量(liang) | 0.1μf±10% | 4μf±10% |
諧(xie)振(zhen)頻(pin)率(shuai) | 120kHz | 65kHz |
使(shi)用(yong)溫(wen)度(duo) | -60~130℃ | -60~130℃ |
居(ji)裏(li)溫(wen)度(duo) | 230℃ | 230℃ |



徐(xu)經(jing)理(li)18995650972